Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Oil & Gas

Product Sub Type

Depth Filters

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Gasket / O-Ring Material

NA

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches

Product ID: CLR13042
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: CLR130
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches

Product ID: CLR2030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
20 micron

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: CLR303040
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT0530U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
0.5 micron

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT130U769
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT130UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT130U1X
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches

Product ID: NXT20030U
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT2530U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT330U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT4030U1X
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
16 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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