Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Product Type

Large Format Filters

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Resinbondedglassfiber, Length 20 Inches, Nitrile O-ring Material

Product ID: HFU620GF020H13
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY400J
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, Fluorocarbon elastomer, Plastic self-adjusting flange, Pall Marksman Series vessels, Rosedale4, Strainrite, Krystil Klear

Product ID: PFTM102UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 1 bag, No flange

Product ID: PFTM401UNF
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, Nitrile

Product ID: PFTM402UNPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 90 µm, polypropylene, Size 2 bag, EPDM

Product ID: PFTM902UEPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 bag, EPDM

Product ID: XLDM102UEPFB
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 30 µm, Polypropylene, Size 2 bag, Nitrile

Product ID: XLDM302UNPFB
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 4.5 µm, Polypropylene, Size 2 bag, Nitrile, Plastic self-adjusting flange

Product ID: XLDM452UNPFB
Unit of Measure
4/EA
Min Order Qty
4

New: Retrofit for PECO PPL-347 Filter Element
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3M High Flow Retrofit Filter Element from Pall
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New: Retrofit for Pentair Compax Filter Element
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55 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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