Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Product Type

Metal Filters

MBS1001M100H product photo

MBS1001M100H

Product ID: MBS1001M100H
Unit of Measure
1/EA
Min Order Qty
1
CARTRG MBS1001S050H2 product photo

CARTRG MBS1001S050H2

Product ID: MBS1001S050H2
Unit of Measure
1/EA
Min Order Qty
1
MBS1002RMH product photo

MBS1002RMH

Product ID: MBS1002RMH
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 2.50, 54.00, 150 product photo

ELEM,BLBK,W , 2.50, 54.00, 150

Product ID: D11881101H37S
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 3.50,114.64, 50 product photo

ELEM,BLBK,W , 3.50,114.64, 50

Product ID: D12767001J04U
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 3.50,110.64, 50 product photo

ELEM,BLBK,W , 3.50,110.64, 50

Product ID: D12767201J04U
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 3.50,137.64, 50 product photo

ELEM,BLBK,W , 3.50,137.64, 50

Product ID: D12767202J04U
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 3.50,141.64, 50 product photo

ELEM,BLBK,W , 3.50,141.64, 50

Product ID: D12767002J04U
Unit of Measure
1/EA
Min Order Qty
1
ELEM, ULTIPLEAT, 63.0, 850.9, 128 product photo

ELEM, ULTIPLEAT, 63.0, 850.9, 128

Product ID: D135381013411
Unit of Measure
1/EA
Min Order Qty
1
ELEM,UPPLUS,1.46,21.28,1850 product photo

ELEM,UPPLUS,1.46,21.28,1850

Product ID: D136243013412
Unit of Measure
1/EA
Min Order Qty
1
PSC06-10-S-DOE/8082160000 product photo

PSC06-10-S-DOE/8082160000

Product ID: DC1000HDOH06C
Unit of Measure
1/EA
Min Order Qty
1
PWC70-10-S-DOE/8101105000 ST product photo

PWC70-10-S-DOE/8101105000 ST

Product ID: DP1000HDOH070
Unit of Measure
1/EA
Min Order Qty
1
19 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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