Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Cartridge Length (Imperial)

20 in

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR520M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial

Product ID: PFT02520UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer

Product ID: PFT02520USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
PFT 0.45-20UE-M7W 480 product photo

PFT 0.45-20UE-M7W 480

Product ID: PFT04520UEM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Ethylene Propylene Rubber product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Ethylene Propylene Rubber

Product ID: PFT320UEW480
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial, No Bubble Test

Product ID: PFT520UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 20 Inches, Electrolytic tin plated steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 20 Inches, Electrolytic tin plated steel, Bulk packaging

Product ID: R005AW20T
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: R2F1200TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: R2F900TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
See All Attributes

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: R2F200TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 20 Inches

Product ID: RGN2FN200
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: RM2F007H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.7 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes
111 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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