Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Oil & Gas

Availability

In Stock

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Resinbondedglassfiber, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640GF200H13
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Polypropylene, Length 40 Inches

Product ID: HFU640UY400JUW
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY100H13
Unit of Measure
1/EA
Min Order Qty
1
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Polypropylene, Length 60 Inches

Product ID: HFU660UY200JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
20 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes

Ultipleat® High Flow Element, HFU660UY100JUW

Product ID: HFU660UY100JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
10 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 70 µm, Pleated Polypropylene Depth Structure, Length 60 Inches, Ethylene Propylene O-ring Material

Product ID: HFU660UY700J
Unit of Measure
1/EA
Min Order Qty
1

LSS06F1H

Product ID: LSS06F1H
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
6 in
Coalescer Length (Metric)
15.2 cm

MCC1401U2-20ZH13

Product ID: MCC1401U220ZH13
Unit of Measure
1/EA
Min Order Qty
1

ORJ-342 NORDEL EPDM PEROXIDE

Product ID: T10520035
Unit of Measure
1/EA
Min Order Qty
1

ORG NORDEL EPDM PEROXIDE CURED

Product ID: T10540347
Unit of Measure
1/EA
Min Order Qty
1

FDA CH GASKET EPDM DOWN F

Product ID: T10593090
Unit of Measure
1/EA
Min Order Qty
1
UNIV SEAT CUP 1.75ID 316L product photo

UNIV SEAT CUP 1.75ID 316L

Product ID: T10575031
Unit of Measure
1/EA
Min Order Qty
1
86 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English