Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Availability

In Stock

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Resinbondedglassfiber, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640GF200H13
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Polypropylene, Length 40 Inches

Product ID: HFU640UY400JUW
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY100H13
Unit of Measure
1/EA
Min Order Qty
1
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Polypropylene, Length 60 Inches

Product ID: HFU660UY200JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
20 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Ultipleat® High Flow Element, HFU660UY100JUW

Product ID: HFU660UY100JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
10 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Ultipleat® High Flow, Large Format Filters, Filter Grade 70 µm, Pleated Polypropylene Depth Structure, Length 60 Inches, Ethylene Propylene O-ring Material

Product ID: HFU660UY700J
Unit of Measure
1/EA
Min Order Qty
1

CRTG PUY1J012J

Product ID: PUY1J012J
Unit of Measure
24/EA
Min Order Qty
24
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel

Product ID: R020AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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This product is currently not available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F005TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: R2F200TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: RM2F900H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
90 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel, Bulk packaging

Product ID: RT001AW195S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
86 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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