Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Availability

In Stock

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene

Product ID: U010AW40U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 39.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 39.5 Inches, 304 stainless steel

Product ID: U020AW395A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, Polypropylene

Product ID: U020AW40U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

8671 head to bowl o-ring, Viton

Product ID: UK19673
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: XLDM152UEPFA
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Polypropylene, Length 40 Inches

Product ID: HFU640UY400JUW
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Polypropylene, Length 60 Inches

Product ID: HFU660UY200JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
20 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Ultipleat® High Flow, Large Format Filters, Filter Grade 70 µm, Pleated Polypropylene Depth Structure, Length 60 Inches, Ethylene Propylene O-ring Material

Product ID: HFU660UY700J
Unit of Measure
1/EA
Min Order Qty
1
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches

Product ID: F020AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches

Product ID: F010AW20A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel

Product ID: G010AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 40 Inches, 304 stainless steel

Product ID: G030AW40A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
80 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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