Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Power & Utilities

LMO10S-3/4HP product photo

LMO10S-3/4HP

Product ID: LMO10S34HP
Unit of Measure
1/EA
Min Order Qty
1
MPGH01020SOE product photo

MPGH01020SOE

Product ID: MPGH01020SOE
Unit of Measure
30/EA
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30
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches

Product ID: N001A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches

Product ID: NC010AW30T
Unit of Measure
10/EA
Min Order Qty
10
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Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, 304 stainless steel

Product ID: NC010AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches

Product ID: NC050AW30T
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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NC075AW40A

Product ID: NC075AW40A
Unit of Measure
10/EA
Min Order Qty
10
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, 304 stainless steel

Product ID: NC050AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 30 Inches

Product ID: NC075AW30T
Unit of Measure
10/EA
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10
Packaging
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P005RC30S 395

Product ID: P005RC30S395
Unit of Measure
5/EA
Min Order Qty
5
WS18 - 1/2" NPT 200mm Probe 10m Cable product photo

WS18 - 1/2" NPT 200mm Probe 10m Cable

Product ID: WS18DSB08L10
Unit of Measure
1/EA
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1

HDC® II Filter Cartridges, Removal Rating 4.5 μm, Length 20 inches, 222 Finned end

Product ID: AB2J0458PH1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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127 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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