Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Power & Utilities

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel

Product ID: G030AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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F85360VE-CU product photo

F85360VE-CU

Product ID: F85360VECU
Unit of Measure
1/EA
Min Order Qty
1
MPGH01020SOE product photo

MPGH01020SOE

Product ID: MPGH01020SOE
Unit of Measure
30/EA
Min Order Qty
30

10P30U

Product ID: 10P30U
Unit of Measure
20/EA
Min Order Qty
20

1C30S

Product ID: 1C30S
Unit of Measure
20/EA
Min Order Qty
20
Balston Filter product photo

Balston Filter

Product ID: 20035DX
Unit of Measure
10/EA
Min Order Qty
10

200NC30U

Product ID: 200NC30U
Unit of Measure
20/EA
Min Order Qty
20

20C30A-EA

Product ID: 20C30AEA
Unit of Measure
20/EA
Min Order Qty
20

20U10U

Product ID: 20U10U
Unit of Measure
60/EA
Min Order Qty
60
PAPER FILTER product photo

PAPER FILTER

Product ID: 3217332K910
Unit of Measure
2/EA
Min Order Qty
2
3L1025W40A product photo

3L1025W40A

Product ID: 3L1025W40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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5P40U

Product ID: 5P40U
Unit of Measure
1/EA
Min Order Qty
1
127 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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