Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Power & Utilities

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: C030AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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NC075AW40A

Product ID: NC075AW40A
Unit of Measure
10/EA
Min Order Qty
10

Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel

Product ID: G030AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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P005RC30S 395

Product ID: P005RC30S395
Unit of Measure
5/EA
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5

Discontinued

This part is no longer available. Please contact us for more information.

1C30S

Product ID: 1C30S
Unit of Measure
20/EA
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20

200NC30U

Product ID: 200NC30U
Unit of Measure
20/EA
Min Order Qty
20

5P40U

Product ID: 5P40U
Unit of Measure
1/EA
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1
SUPRAdisc SD 900 300X900C516VP product photo

SUPRAdisc SD 900 300X900C516VP

Product ID: 7005974
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD 300 300X300C216PP product photo

SUPRAdisc SD 300 300X300C216PP

Product ID: B15123
Unit of Measure
1/EA
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1
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel, Bulk packaging

Product ID: C001AW295S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 316 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 316 stainless steel, with Extended Core

Product ID: C001AW30SEC1S
Unit of Measure
10/EA
Min Order Qty
10
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Bulk
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This product is currently not available. Please contact us for more information.

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Electrolytic tin plated steel

Product ID: C001AW30T
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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127 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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