Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Power & Utilities

HGCR-UDX 1-36-P-E-M8 product photo

HGCR-UDX 1-36-P-E-M8

Product ID: HGCRUDX136PEM8
Unit of Measure
12/EA
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12
HGCOLDSG 5-30U-1X 400 product photo

HGCOLDSG 5-30U-1X 400

Product ID: HGCOLDSG530U1X400
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12/EA
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12

This product is currently not available. Please contact us for more information.

HGCR-UDX 20-10 400 product photo

HGCR-UDX 20-10 400

Product ID: HGCRUDX2010400
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36/EA
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36

HZ4740CMV

Product ID: HZ4740CMV
Unit of Measure
1/EA
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1

Discontinued

This part is no longer available. Please contact us for more information.
HOUSING IDLD1GN12H product photo

HOUSING IDLD1GN12H

Product ID: IDLD1GN12H
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1/EA
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LMO10S-3/4HP

Product ID: LMO10S34HP
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1
F85360VE-CU product photo

F85360VE-CU

Product ID: F85360VECU
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SW FILTER 100 UM 30" EXT TIN CORE product photo

SW FILTER 100 UM 30" EXT TIN CORE

Product ID: FBC100R30TE
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15/EA
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GF media, SS304 core, 1µm 30", GF core c

Product ID: FFG1R30S
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10P30U

Product ID: 10P30U
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20/EA
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20

120-013-10 FILTER BAG

Product ID: 12001310FILTERBAG
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72/EA
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72

1C30S

Product ID: 1C30S
Unit of Measure
20/EA
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34 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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