Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Power & Utilities

10P30U

Product ID: 10P30U
Unit of Measure
20/EA
Min Order Qty
20

120-013-10 FILTER BAG

Product ID: 12001310FILTERBAG
Unit of Measure
72/EA
Min Order Qty
72

1C30S

Product ID: 1C30S
Unit of Measure
20/EA
Min Order Qty
20
Balston Filter product photo

Balston Filter

Product ID: 20035DX
Unit of Measure
10/EA
Min Order Qty
10

200NC30U

Product ID: 200NC30U
Unit of Measure
20/EA
Min Order Qty
20

20C30A-EA

Product ID: 20C30AEA
Unit of Measure
20/EA
Min Order Qty
20

20U10U

Product ID: 20U10U
Unit of Measure
60/EA
Min Order Qty
60

PE100P2L

Product ID: PE100P2L
Unit of Measure
50/EA
Min Order Qty
50
F85360VE-CU product photo

F85360VE-CU

Product ID: F85360VECU
Unit of Measure
1/EA
Min Order Qty
1
SW FILTER 100 UM 30" EXT TIN CORE product photo

SW FILTER 100 UM 30" EXT TIN CORE

Product ID: FBC100R30TE
Unit of Measure
15/EA
Min Order Qty
15
PAPER FILTER product photo

PAPER FILTER

Product ID: 3217332K910
Unit of Measure
2/EA
Min Order Qty
2
3L1025W40A product photo

3L1025W40A

Product ID: 3L1025W40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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127 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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