Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Power & Utilities

HDC® II Filter Cartridges, Removal Rating 4.5 μm, Length 20 inches, 222 Finned end

Product ID: AB2J0458PH1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
See All Attributes

AB2PYN18JDUP

Product ID: AB2PYN18JDUP
Unit of Measure
24/EA
Min Order Qty
24
AIRGUARD FILTER 16X20X2 product photo

AIRGUARD FILTER 16X20X2

Product ID: AGMX40STD2201
Unit of Measure
12/EA
Min Order Qty
12
SUPRAdisc SD 300 300X300C216PP product photo

SUPRAdisc SD 300 300X300C216PP

Product ID: B15123
Unit of Measure
1/EA
Min Order Qty
1

PE100P2L

Product ID: PE100P2L
Unit of Measure
50/EA
Min Order Qty
50
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel

Product ID: R020AW30S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, 316 stainless steel

Product ID: R020A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
HGCOLDSG 5-30U-1X 400 product photo

HGCOLDSG 5-30U-1X 400

Product ID: HGCOLDSG530U1X400
Unit of Measure
12/EA
Min Order Qty
12

This product is currently not available. Please contact us for more information.

HGCR-UDX 20-10 400 product photo

HGCR-UDX 20-10 400

Product ID: HGCRUDX2010400
Unit of Measure
36/EA
Min Order Qty
36
HGCR-UDX 1-36-P-E-M8 product photo

HGCR-UDX 1-36-P-E-M8

Product ID: HGCRUDX136PEM8
Unit of Measure
12/EA
Min Order Qty
12

HZ4740CMV

Product ID: HZ4740CMV
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
HOUSING IDLD1GN12H product photo

HOUSING IDLD1GN12H

Product ID: IDLD1GN12H
Unit of Measure
1/EA
Min Order Qty
1
127 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English