Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Power & Utilities

PE100P2L

Product ID: PE100P2L
Unit of Measure
50/EA
Min Order Qty
50

Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 40 Inches

Product ID: RGN4FN200
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1020 mm
Cartridge Length (Metric)
102 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, 304 stainless steel

Product ID: RT001AW20A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: RT010AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 20 Inches

Product ID: RT05AW20SCNM3F
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 304 stainless steel

Product ID: RT020AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
MPGH01020SOE product photo

MPGH01020SOE

Product ID: MPGH01020SOE
Unit of Measure
30/EA
Min Order Qty
30
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches

Product ID: N001A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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HGCOLDSG 5-30U-1X 400 product photo

HGCOLDSG 5-30U-1X 400

Product ID: HGCOLDSG530U1X400
Unit of Measure
12/EA
Min Order Qty
12

This product is currently not available. Please contact us for more information.

HGCR-UDX 20-10 400 product photo

HGCR-UDX 20-10 400

Product ID: HGCRUDX2010400
Unit of Measure
36/EA
Min Order Qty
36
HGCR-UDX 1-36-P-E-M8 product photo

HGCR-UDX 1-36-P-E-M8

Product ID: HGCRUDX136PEM8
Unit of Measure
12/EA
Min Order Qty
12

HZ4740CMV

Product ID: HZ4740CMV
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
127 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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