Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Depth Filters

Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C010A975A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, Polypropylene

Product ID: C010AW20U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 20 Inches, Polypropylene

Product ID: C020AW20U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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ME3300FPG10M 132

Product ID: ME3300FPG10M132
Unit of Measure
30/EA
Min Order Qty
60

Discontinued

This part is no longer available. Please contact us for more information.

ME3300FPR10M 132

Product ID: ME3300FPR10M132
Unit of Measure
30/EA
Min Order Qty
30

Profile® II Filter Cartridge

Product ID: ME3300FPT20M
Unit of Measure
24/EA
Min Order Qty
24

Profile® II Filter Cartridge

Product ID: ME3300FPT30M
Unit of Measure
24/EA
Min Order Qty
24

ME3310CPB40H 132

Product ID: ME3310CPB40H132
Unit of Measure
1/EA
Min Order Qty
1

Profile® II Filter Cartridge

Product ID: ME3300FPT10M
Unit of Measure
24/EA
Min Order Qty
48

Discontinued

This part is no longer available. Please contact us for more information.

ME3310CPG13H 132

Product ID: ME3310CPG13H132
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPG40H 132

Product ID: ME3310CPG40H132
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPN40H

Product ID: ME3310CPN40H
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
1,731 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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