Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Depth Filters

Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, Polypropylene

Product ID: C010AW20U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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CLR 10-30 40

Product ID: CLR103040
Unit of Measure
24/EA
Min Order Qty
24

CLR 10-50-XK

Product ID: CLR1050XK
Unit of Measure
24/EA
Min Order Qty
24

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1

RF-Style 19" Profile II 40µm

Product ID: R19F400
Unit of Measure
24/EA
Min Order Qty
24

CRTG R19F300

Product ID: R19F300
Unit of Measure
24/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM3F030H21
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT0530UDOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXT0530UM8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 29.25 inches

Product ID: NXT1002925U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT10040U1X
Unit of Measure
12/EA
Min Order Qty
12

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
1,642 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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