Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Sub Type

Depth Filters

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Product Use

Pre-Filtration

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches

Product ID: CLR3030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches

Product ID: CLR330
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
3 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches

Product ID: CLR5030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
50 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches

Product ID: CLR530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches

Product ID: CLR7530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
75 micron

Claris® Filter Cartridge, CLR530W480

Product ID: CLR530W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA1030UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA130UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
NXA 1-30U-DOEE product photo

Nexis, NXA, 1 μm, 76.2 cm (30 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA130UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA130U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA130UM3S
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA0530U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
0.5 micron
51 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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