Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Depth Filters

Product Type

Filter Cartridges

PUY2UY020H4

Product ID: PUY2UY020H4
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" Profile Star 5µm

Product ID: MCY1001A050H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Supor® Beverage Filter Cartridges, AB1SBB7WH4

Product ID: AB1SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polyethersulfone (PES)
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Profile® UP Filter Cartridges, Removal Rating 40 μm, Length 20 inches

Product ID: AB2UY4008PH1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD1010UEM3165
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Nitrile, DOE industrial

Product ID: XLD1010UNNET
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated fluorocarbon elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: XLD2010UFM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Poly-Fine® XLD Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, DOE industrial

Product ID: XLD2020UT
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Expanded PTFE (gaskets) FEP encapsulated silicone (O-rings)
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XLD 20-40UN-M3

Product ID: XLD2040UNM3
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Polypropylene, EPDM, Double-Open End (DOE)

Product ID: XLD30TFUE147
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
No code
End Configuration
No Code - Double-Open End (DOE)
Gasket O-Ring Code
E
Cage, Core, Fin End and Endcap
Polypropylene
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, FEP encapsulated fluorocarbon elastomer Orings, SOE fin end external 226 O-rings

Product ID: XLD320UFM7B229
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: XLD1040UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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221 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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