Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Depth Filters

Product Type

Filter Cartridges

Element 1" PROFILE STAR UNICAP 0.8µm NPL

Product ID: H1A1A0081JNPL
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Element 1" PROFILE STAR UNICAP 20µm

Product ID: H1A1A2001J
Unit of Measure
1/EA
Min Order Qty
1

MCS1201UY060J

Product ID: MCS1201UY060J
Unit of Measure
1/EA
Min Order Qty
1

Profile® UP Filter Cartridges, Removal Rating 40 μm, Length 20 inches

Product ID: AB2UY4008PH1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Profile® UP Filter Cartridges, Removal Rating 50 μm, Length 20 inches

Product ID: AB2UY5007H1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
50 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Profile® UP Filter Cartridges, Removal Rating 70 μm, Length 20 inches

Product ID: AB2UY7007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® Star, Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Core

Product ID: AB3A0157H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® Star, Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 30 Inches, Ethylene Propylene

Product ID: AB3A0157J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, silicone

Product ID: AB3A0307H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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This product is currently not available. Please contact us for more information.

Profile® Star, FilterCartridges, Removal Rating 1.5 μm, Polypropylene, Length 30 Inches

Product ID: AB3A0153H1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Ethylene Propylene

Product ID: AB3A0307PJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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This product is currently not available. Please contact us for more information.

Profile® Star Filter Cartridge, AB3A0307WH4

Product ID: AB3A0307WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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221 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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