Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

5µm (nominal) CB Micro-Carbon™ II Series filter, 10", DOE with gaskets

Product ID: C10PCB5
Unit of Measure
12/EA
Min Order Qty
12

C10P-PHP

Product ID: C10PPHP
Unit of Measure
20/EA
Min Order Qty
20

5µm (nominal) CB Micro-Carbon™ II Series filter, 20", DOE with gaskets

Product ID: C20PCB5
Unit of Measure
6/EA
Min Order Qty
6

Micro-Carbon™ II Series Filter 30 in 5 µm

Product ID: C30PPHP
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Outer shell - Porous, high density polyethylene (70 µm nominal)
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Hercuprene
See All Attributes

C9.75P-PHP

Product ID: C975PPHP
Unit of Measure
20/EA
Min Order Qty
20

C9.75P-CB5

Product ID: C975PCB5
Unit of Measure
12/EA
Min Order Qty
12

GP 10-20A-X4V 246

Product ID: GP1020AX4V246
Unit of Measure
1/EA
Min Order Qty
1

GP 1-4U-X3S 246

Product ID: GP14UX3S246
Unit of Measure
1/EA
Min Order Qty
1

GP 3-30A-X4N 246

Product ID: GP330AX4N246
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

GP 30-10U-X4N 246

Product ID: GP3010UX4N246
Unit of Measure
1/EA
Min Order Qty
1

GP 50-10U-X4N 246

Product ID: GP5010UX4N246
Unit of Measure
1/EA
Min Order Qty
1
DFN 3-30AN-1X product photo

DFN 3-30AN-1X

Product ID: DFN330AN1X
Unit of Measure
12/EA
Min Order Qty
12

This product is currently not available. Please contact us for more information.

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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