Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

Cartridge Length (Metric)

1016 mm

Supor® Beverage Filter Cartridges, 40in, Silicone Elastomer

Product ID: AB4SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
Maximum Differential Pressure
5.5 bard (79.8 psid) (forward pressure)
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Duo-Fine®, Filter Cartridges, Removal Rating 0.2 μm, Length 40 Inches

Product ID: DFPT0240UGTMG7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Oenopure™ Filter Cartridges, AB4GB8WJ

Product ID: AB4GB8WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Hydrophillic Polyethersulfone
Effective Filtration Area (Metric cm²)
2.4 cm²
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
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This product is currently not available. Please contact us for more information.

Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm Single Layer, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN4NB7BWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Bleached cotton, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: C100AW40S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
100 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 40 Inches

Product ID: DFN0240UEM26
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 40 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: DFN04540USM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M3
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Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN1040AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN140UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 3 μm, Length 40 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN340UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 40 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT04540UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Fluorocarbon Elastomer

Product ID: DFNT1040UVM18
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
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83 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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