Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

5EC4888-539C-HY40

Product ID: 5EC4888539CHY40
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-3U2-20Z-140

Product ID: 5ESC107703U220Z140
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Emflon® PFRW Filter Cartridge, AB05PFR2WH4

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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Fluorodyne® II Filter Cartridges, AB1FSD7WH4

Product ID: AB1FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric m²)
0.55 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Filter 10" HDC II 1.2µm

Product ID: AB1J0127J
Unit of Measure
6/EA
Min Order Qty
6

AB1J012-8H4

Product ID: AB1J0128H4
Unit of Measure
6/EA
Min Order Qty
6
Filter 10" HDC II 4.5µm product photo

Filter 10" HDC II 4.5µm

Product ID: AB1J0457H4
Unit of Measure
6/EA
Min Order Qty
6

CRTG AB1U2-20Z-7H

Product ID: AB1U220Z7H
Unit of Measure
1/EA
Min Order Qty
1

HDC® II Filter Cartridges, Removal Rating 1.2 μm, Length 20 inches

Product ID: AB2J0128H1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.2 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Fluorodyne® II Filter Cartridges, 0.2µm, 20in, Single Open End Code 7, Silicone Elastomer O-ring

Product ID: AB2FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0 µm
Membrane Material
Polyvinylidene fluoride (PVDF)
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket O-Ring Code
H4
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HDC® II Filter Cartridges, Removal Rating 2.5 μm, Length 20 inches, silicone

Product ID: AB2J0257H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
2.5 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Ultipor® GF Plus Filter Cartridges, Removal Rating 3 μm, Length 20 inches, Polypropylene Core

Product ID: AB2U030Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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