Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

String Wound Filters

Product Type

Filter Cartridges

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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T010AW20Y product photo

T010AW20Y

Product ID: T010AW20Y
Unit of Measure
10/EA
Min Order Qty
10
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 40 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 40 Inches, 304 stainless steel, Bulk packaging

Product ID: U005AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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U010AW19.5S product photo

U010AW19.5S

Product ID: U010AW195S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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U010KK20 product photo

U010KK20

Product ID: U010KK20
Unit of Measure
6/EA
Min Order Qty
6
Packaging
Bulk
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U030AW30U-EC1U product photo

U030AW30U-EC1U

Product ID: U030AW30UEC1U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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U100AW30A

Product ID: U100AW30A
Unit of Measure
10/EA
Min Order Qty
10
E001AW30S product photo

E001AW30S

Product ID: E001AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 30 Inches

Product ID: F005AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer

Product ID: C001AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 10 Inches, 304 stainless steel

Product ID: C030A10A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
30 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel

Product ID: C075AW295S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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582 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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