Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Diagnostic and Monitoring Equipment

PCM500WUC MONITOR CLEANLINESS product photo

PCM500WUC MONITOR CLEANLINESS

Product ID: PCM500WUC
Unit of Measure
1/EA
Min Order Qty
1
RC778NZ086Z INDICATOR product photo

RC778NZ086Z INDICATOR

Product ID: RC778NZ086Z
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 100mm Probe 2m Cable product photo

WS18 - 1/2" NPT 100mm Probe 2m Cable

Product ID: WS18DSB08
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 100mm Probe 5m Cable product photo

WS18 - 1/2" NPT 100mm Probe 5m Cable

Product ID: WS18DSB0805
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 100mm Probe 10m Cable product photo

WS18 - 1/2" NPT 100mm Probe 10m Cable

Product ID: WS18DSB0810
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 200mm Probe 5m Cable product photo

WS18 - 1/2" NPT 200mm Probe 5m Cable

Product ID: WS18DSB08L05
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" BSP 100mm Probe 5m Cable product photo

WS18 - 1/2" BSP 100mm Probe 5m Cable

Product ID: WS18DSC0805
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 200mm Probe 2m Cable product photo

WS18 - 1/2" NPT 200mm Probe 2m Cable

Product ID: WS18DSB08L
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" BSP 200mm Probe 10m Cable product photo

WS18 - 1/2" BSP 200mm Probe 10m Cable

Product ID: WS18DSC08L10
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" BSP 100mm Probe 2m Cable product photo

WS18 - 1/2" BSP 100mm Probe 2m Cable

Product ID: WS18DSC08
Unit of Measure
1/EA
Min Order Qty
1
WS18DSMB08L10 product photo

WS18-1/2' NPT,200mmProbe,RS485Modbus,10m

Product ID: WS18DSMB08L10
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" BSP 200mm Probe 2m Cable product photo

WS18 - 1/2" BSP 200mm Probe 2m Cable

Product ID: WS18DSC08L
Unit of Measure
1/EA
Min Order Qty
1
124 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English