Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Capsules

Product ID: 3MCFPRM4
Unit of Measure
1/PAC
Min Order Qty
1
Retention Rating
20 nm µm
Membrane Material
Polyethersulfone (PES)
Industry-Specific Certification
Pharmaceutical (Scaling Tool)
Effective Filtration Area (Metric)
2.8 cm²
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Product ID: 4MCFPRT4R
Unit of Measure
1/PAC
Min Order Qty
1
Membrane Material
Nylon
Industry-Specific Certification
Pharmaceutical (Scaling Tool)
Effective Filtration Area (Metric)
3.9 cm²
Format
Microdisc
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Profile® Star membrane in Mini Profile® capsules, 1.5 µm removal rating, 90 cm² EFA, ½ in hose barb connections, box of 3 product photo
Product ID: BYA015P6
Unit of Measure
1/BOX
Min Order Qty
1
Effective Filtration Area (Metric)
90 cm²
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Profile® Star membrane in Mini Profile® capsules, 3 µm removal rating, 90 cm² EFA, ½ in hose barb connections, box of 3 product photo
Product ID: BYA030P6
Unit of Measure
1/pkg
Min Order Qty
1
Effective Filtration Area (Metric)
90 cm²
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Profile® II depth filter in Mini Profile® capsules, 5 µm removal rating, 46 cm² EFA, ½ in hose barb connections, box of 3 product photo
Product ID: BYY050P6
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
46 cm²
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Profile® II depth filter in Mini Profile® capsules, 0.5 µm removal rating, 46 cm² EFA, ½ in hose barb connections, box of 3 product photo
Product ID: BYY005P6
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
46 cm²
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Profile® II depth filter in Mini Profile® capsules, 10 µm removal rating, 46 cm² EFA, ½ in hose barb connections, box of 3 product photo
Product ID: BYY100P6
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
46 cm²
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Profile® II depth filter in Mini Profile® capsules, 1 µm removal rating, 46 cm² EFA, ½ in hose barb connections, box of 3 product photo
Product ID: BYY010P6
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
46 cm²
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DFA Capsule HDC II 6µm product photo
Product ID: DFA3001J060
Unit of Measure
6/EA
Min Order Qty
6
DFA Capsule HDC II 20µm product photo
Product ID: DFA4001J200
Unit of Measure
6/EA
Min Order Qty
6
DFA Capsule HDC II 6µm product photo
Product ID: DFA4001J060
Unit of Measure
1/EA
Min Order Qty
1
Product ID: DFA3001UUAC
Unit of Measure
1/EA
Min Order Qty
1
Industry-Specific Certification
Pharmaceutical Grade
Effective Filtration Area (Metric)
900 cm²
Format
PreFlow Capsule
Inlet Connection
⅜ in (10 mm) hose barb
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186 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets