Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Format

Kleenpak

Product Type

Filter Capsules

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA1EKVP1G
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
375 cm²
Sterilization Option(s)
Suitable for Gamma Irradiation, Suitable for Autoclave
Inlet Connection
1-1½ in (25-38 mm) sanitary flange
See All Attributes

This product is currently not available. Please contact us for more information.

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1EKVP1S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
375 cm²
Sterilization Option(s)
Provided Pre-Sterilized by Gamma Irradiation
Inlet Connection
1-1½ in (25-38 mm) sanitary flange
See All Attributes

This product is currently not available. Please contact us for more information.

HDC® II membrane in Kleenpak™ capsule, 6 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 6 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J060P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
6 µm
See All Attributes
HDC® II membrane in Kleenpak™ capsule, 1.2 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 1.2 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J012P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.2 µm
See All Attributes
Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation

Product ID: KA1EKVP6S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
375 cm²
Sterilization Option(s)
Provided Pre-Sterilized by Gamma Irradiation
Inlet Connection
½ in (13 mm) hose barb
See All Attributes

This product is currently not available. Please contact us for more information.

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA1EKVP6G
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
375 cm²
Sterilization Option(s)
Suitable for Gamma Irradiation, Suitable for Autoclave
Inlet Connection
½ in (13 mm) hose barb
See All Attributes
HDC® II membrane in Kleenpak™ capsule, 10 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 10 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J100P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
See All Attributes
HDC® II membrane in Kleenpak™ capsule, 4.5 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 4.5 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J045P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1V002PV1S
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
380 cm²
See All Attributes
Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 750 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 750 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA2EKVP1S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
750 cm²
Sterilization Option(s)
Provided Pre-Sterilized by Gamma Irradiation
Inlet Connection
1-1½ in (25-38 mm) sanitary flange
See All Attributes

This product is currently not available. Please contact us for more information.

HDC® II membrane in Kleenpak™ capsule, 0.6 µm removal rating, 1000 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 0.6 µm removal rating, 1000 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA2J006P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.6 µm
See All Attributes
Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 750 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 750 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation

Product ID: KA2EKVP6S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
750 cm²
Sterilization Option(s)
Provided Pre-Sterilized by Gamma Irradiation
Inlet Connection
½ in (13 mm) hose barb
See All Attributes

This product is currently not available. Please contact us for more information.

29 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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