Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Cartridges

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
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1/EA
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P010AW30S-EC1S-1PK

Product ID: P010AW30SEC1S1PK
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10/EA
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DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 Inches

Product ID: P025AW40A
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel

Product ID: P010RC30S395
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: P010RW30S
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: P020RW30S
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5ESC10770-2U0045J-022

Product ID: P1122212
Unit of Measure
1/EA
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1

5ESC10670-2U2-20ZJ-008

Product ID: P1122390
Unit of Measure
1/EA
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5ESC10770-2U100ZJ-105

Product ID: P1122631
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1/EA
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5ESC10770-2U2-20ZJ-096

Product ID: P1122536
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5ESC10770-2U200ZJ-063 product photo

5ESC10770-2U200ZJ-063

Product ID: P1122684
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5ESC11270-1U400ZJ-014

Product ID: P1122560
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4,154 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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