Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 304 stainless steel

Product ID: C001AW30A
Unit of Measure
1/EA
Min Order Qty
1

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, Polypropylene

Product ID: C010AW20U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 10 Inches, 304 stainless steel

Product ID: C030A10A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
30 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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CLR 10-30 40

Product ID: CLR103040
Unit of Measure
24/EA
Min Order Qty
24

CLR 10-50-XK

Product ID: CLR1050XK
Unit of Measure
24/EA
Min Order Qty
24
CLR 5-30-DOEE product photo

CLR 5-30-DOEE

Product ID: CLR530DOEE
Unit of Measure
12/EA
Min Order Qty
12

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1
DFN 3-30AN-1X product photo

DFN 3-30AN-1X

Product ID: DFN330AN1X
Unit of Measure
12/EA
Min Order Qty
12

This product is currently not available. Please contact us for more information.

DFNE50040AV

Product ID: DFNE50040AV
Unit of Measure
12/EA
Min Order Qty
12

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT04520USM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, silicone, SOE fin end external 222 O-rings

Product ID: DFNT120USM8
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
End Configuration
SOE fin end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

DFNT 1-30UN-M7

Product ID: DFNT130UNM7
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
2,916 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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