Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Cartridge Length (Metric)

1016 mm

Duo-Fine®, Filter Cartridges, Removal Rating 0.2 μm, Length 40 Inches

Product ID: DFPT0240UGTMG7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 40 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 40 Inches, 316 stainless steel

Product ID: F001AW40SCE1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 40 Inches, 304 stainless steel

Product ID: GG05AW40A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Supor® Beverage Filter Cartridges, 40in, Silicone Elastomer

Product ID: AB4SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
Maximum Differential Pressure
5.5 bard (79.8 psid) (forward pressure)
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G001AW40SEC1S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 40 Inches, 316 stainless steel, with End Treatment, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 40 Inches, 316 stainless steel, with End Treatment, Individually wrapped

Product ID: G030AW40SE1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene

Product ID: U005AW40U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: U020AW40S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene

Product ID: U010AW40U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Length 40 Inches, Polypropylene

Product ID: U020AW40UEM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, Polypropylene

Product ID: U020AW40U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 40 Inches, Polypropylene

Product ID: U025AW40U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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336 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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