Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Gasket / O-Ring Material

NA

Cartridge Length (Metric)

1016 mm

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: CLR1040H21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, SOE metal spring/polypropylene cap saw cut end

Product ID: CLR540SI
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXA1040U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXA1040UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes

This product is currently not available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXA140UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXA140U
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXA2040UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXA2040U
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron

Nexis® A Series Filter Cartridges, Polypropylene, Length 40 inches

Product ID: NXA240U
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXA4040UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
40 micron

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXA540UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 40 inches

Product ID: NXA7040U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes
49 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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