Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Cartridge Length (Metric)

508 mm

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, Polypropylene

Product ID: C010AW20U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, silicone, SOE fin end external 226 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, silicone, SOE fin end external 226 O-rings, No Bubble Test

Product ID: PFT0220USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Nitrile, DOE industrial

Product ID: PFT0220UNB
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: PFT0820UFM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.8 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT1020UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer

Product ID: PFT220UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm

Ultipor® GF Plus Filter Cartridges, Removal Rating 3 μm, Length 20 inches, Polypropylene Core

Product ID: AB2U030Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Ultipor® GF Plus Filter Cartridges, Length 20 inches, Dual 222 size O-rings finned end

Product ID: AB2U640Z8H4
Unit of Measure
1/EA
Min Order Qty
1
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes
NXA 1-20U-M8E product photo

Nexis, NXA, 1 μm, 50.8 cm (20 in), SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5), EPDM gasket

Product ID: NXA120UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches

Product ID: NXAQ120UM7T12
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M7
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT520UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, EPDM, SOE fin end external 222 O-rings

Product ID: CLR520M8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes
599 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English