Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 inches

Product ID: NXA55U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA540UM3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches

Product ID: NXA5975U
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 10 inches

Product ID: NXA7010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
70 micron

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA5TFUDOEE47
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXA
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Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 20 inches

Product ID: NXA7020U
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, SOE plastic spring assembly saw cut end

Product ID: NXA540UXK
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 20 inches, silicone

Product ID: NXA7020UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 30 inches

Product ID: NXA7030U946
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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NXA 70-10U-M7S product photo

Nexis, NXA, 70 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA7010UM7S
Unit of Measure
30/EA
Min Order Qty
30
Micron
70 micron

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXA7030UM18N
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Nexis® A Series Filter Cartridges, Removal Rating 90 μm, Polypropylene, Length 10 inches

Product ID: NXA9010U
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
90 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.
1,904 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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