Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Gasket / O-Ring Material

Fluorocarbon Elastomer

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer

Product ID: CLR1020M3V
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Discontinued

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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer

Product ID: C001AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Poly-Fine® II Filter Cartridges, Removal Rating 0.25 μm, Length 29.25 inches

Product ID: QMPT002292UV
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.25 µm
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
Blank
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Discontinued

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Poly-Fine® II Filter Cartridges, Removal Rating 1 μm, Length 30 inches, Fluorocarbon Elastomer

Product ID: QMPT010300UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Poly-Fine® II Filter Cartridges, Removal Rating 10 μm, Length 30 inches, Fluorocarbon Elastomer

Product ID: QMPT100300UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT320UM3V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: NXT350UM7V
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M7
End Configuration
M7 - SOE fin end, external 226 O-rings (retrofits othermanufacturers’ Code 7)4
Cartridge Type
NXT
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Discontinued

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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT340UM8V
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-ring

Product ID: NXT4040UM18V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT5010UM3V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT5010UM8V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT5020UM3V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
213 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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