Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: C030AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 39 Inches

Product ID: HC8900FRS39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
12 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 8 inches

Product ID: HC9020FRN8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 16 inches

Product ID: HC9651FHP16Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Glass Fiber

Ultipor® GF Plus Filter Cartridges, Removal Rating 3 μm, Length 20 inches, Polypropylene Core

Product ID: AB2U030Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Ultipor® GF Plus Filter Cartridges, Length 20 inches, Dual 222 size O-rings finned end

Product ID: AB2U640Z8H4
Unit of Measure
1/EA
Min Order Qty
1
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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MCS1001U200ZH

Product ID: MCS1001U200ZH
Unit of Measure
12/EA
Min Order Qty
12

Filter 10" HDC II 20µm

Product ID: MCY1001J200H13
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 70µm

Product ID: MCY1001J700H13
Unit of Measure
1/EA
Min Order Qty
1

Junior Filter HDC II 4.5µm

Product ID: MCY4463J045H
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, silicone, SOE fin end external 222 O-rings

Product ID: DFNT1010USM8
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
End Configuration
SOE fin end, external 222 O-rings
Change Out Differential Pressure
2.4 bard
564 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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