Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Sheets

Filter Media

Cellulose Fibers

Product ID: 5303904
Unit of Measure
750/EA
Min Order Qty
750
Filter Media
Cellulose Fibers
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Metric)
1003x1014
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Product ID: 5307570
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
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Product ID: 5307573
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
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Product ID: 692228
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Cellulose Fibers
Filter Area (Imperial)
3.42 ft²
Filter Area (Metric)
0.32 m²
Size (Imperial)
15.7 x 31.4 in
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4 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets