Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

MDS4463GN8MFH1 product photo

MDS4463GN8MFH1

Product ID: MDS4463GN8MFH1
Unit of Measure
1/EA
Min Order Qty
1
IDL11GN12H product photo

IDL11GN12H

Product ID: IDL11GN12H
Unit of Measure
1/EA
Min Order Qty
1
118210151, Hardened Washer product photo

118210151, Hardened Washer

Product ID: 118210151
Unit of Measure
1/EA
Min Order Qty
1

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: HZ9021K12SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in BSP Ports, 4in Length, Nitrile Seals

Product ID: HH9021C12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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HP8600B16TSSW0XYV1 ASSYFLTR VILTER 3007A product photo

HP8600B16TSSW0XYV1 ASSYFLTR VILTER 3007A

Product ID: HP8600B16TSSW0XYV1
Unit of Measure
1/EA
Min Order Qty
1

Ultipor, 1200psi Duplex Hsg, 1.25in BSP Ports, 16in Length, Nitrile Seals

Product ID: HH8670C20UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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HHT200A161CSSBG Assembly Filter In-Tank

Product ID: HHT200A161CSSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 150psi Simplex Hsg, 1in SAE Ports, 8in Length, Nitrile Seals

Product ID: HHT200A161CTSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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HHT200A161CSRBG Assembly Filter In-Tank

Product ID: HHT200A161CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 150psi Simplex Hsg, 0.75in SAE Ports, 4in Length, Nitrile Seals

Product ID: HHT200A121CTRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.5in Manifold Mount, 26in Length, Fluorocarbon Seals

Product ID: HZ9901S24VW1YC06
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
26 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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729 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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