Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9021C12SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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IDL11GN12H product photo

IDL11GN12H

Product ID: IDL11GN12H
Unit of Measure
1/EA
Min Order Qty
1
MDS4463GN8MFH1 product photo

MDS4463GN8MFH1

Product ID: MDS4463GN8MFH1
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 2-HIGH TYPE 2

Product ID: SPMRTF22
Unit of Measure
1/EA
Min Order Qty
1
UNIV SEAT CUP 1.75ID 316L product photo

UNIV SEAT CUP 1.75ID 316L

Product ID: T10575031
Unit of Measure
1/EA
Min Order Qty
1

Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UR619CD4020ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
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Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR619CD4040ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
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Athalon, 145psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UT210A1608ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
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VP4-3/4-222 product photo

VP4-3/4-222

Product ID: VP434222
Unit of Measure
1/EA
Min Order Qty
1

SUPRAdisc™ 16-01 with Drain

Product ID: WSFZ161F31UT5J
Unit of Measure
1/EA
Min Order Qty
1

Housing O-Ring Gen 2&3

Product ID: ACS1039EM
Unit of Measure
1/EA
Min Order Qty
1

Athalon, 217psi Duplex Hsg, 6in Flange Ports, 40in Length, Nitrile Seals

Product ID: AFV07DJ06HBCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
6 in
Number of Cartridges
7 per side
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661 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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