Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

MDS4463GN8MFH1 product photo

MDS4463GN8MFH1

Product ID: MDS4463GN8MFH1
Unit of Measure
1/EA
Min Order Qty
1

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: HZ9681S20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9801C16SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 2in Flange Ports, 26in Length, Fluorocarbon Seals

Product ID: HZ9901G32VW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
26 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 2in Flange Ports, 39in Length, Fluorocarbon Seals

Product ID: HZ9901G32XW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
39 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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IDL11GN12H product photo

IDL11GN12H

Product ID: IDL11GN12H
Unit of Measure
1/EA
Min Order Qty
1
VP4-3/4-222 product photo

VP4-3/4-222

Product ID: VP434222
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 3-HIGH TYPE 2

Product ID: SPMRTF23
Unit of Measure
1/EA
Min Order Qty
1

AFV07DJ04HB-CN

Product ID: AFV07DJ04HBCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
4 in
Number of Cartridges
7 per side
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Athalon, 217psi Non-bypass Duplex Hsg, 4in Flange Ports, 40in Length, Nitrile Seals

Product ID: AFV07DJ04HNCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
4 in
Number of Cartridges
7 per side
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Athalon, 217psi Duplex Hsg, 6in Flange Ports, 40in Length, Nitrile Seals

Product ID: AFV07DJ06HBCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
6 in
Number of Cartridges
7 per side
See All Attributes

AFV03DJ04HB-CN

Product ID: AFV03DJ04HBCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
4 in
Number of Cartridges
3 per side
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729 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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