Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

RISER PIPING WSFZ TC 2.0

Product ID: GFB0156
Unit of Measure
1/EA
Min Order Qty
1

WSFZ Standard Accessory Kit

Product ID: GFB0157
Unit of Measure
1/EA
Min Order Qty
1
H4HF6H20F1BH product photo

Stainless steel, 4 Round x 60” elements, Horizontal

Product ID: H4HF6H20F1BH
Unit of Measure
1/EA
Min Order Qty
1
BOWL 10" MEGAPLAST G2 PFA440HP product photo

BOWL 10" MEGAPLAST G2 PFA440HP

Product ID: CC36849D02
Unit of Measure
1/EA
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1
CCL4001G160H13 product photo

CCL4001G160H13

Product ID: CCL4001G160H13
Unit of Measure
1/EA
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1

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.5in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH9681C24SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 8in Length, Nitrile Seals

Product ID: HH9681S20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Flange Ports, 8in Length, Nitrile Seals

Product ID: HH9681G20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH9681C20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.5in BSP Ports, 16in Length, Nitrile Seals

Product ID: HH9681C24UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 13in Length, Nitrile Seals

Product ID: HH9681K20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in BSP Ports, 13in Length, Nitrile Seals

Product ID: HH9681C20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes
729 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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