Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

MDS4463GN8MFH1 product photo

MDS4463GN8MFH1

Product ID: MDS4463GN8MFH1
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak Housing Torque Unit Vented

Product ID: ACS1040AA
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 4-HIGH TYPE 2

Product ID: SPMRTF24
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak S series Filter Housings without Base Plate, 1 in, Clamp Coupling (ISO 2852)

Product ID: SPSWA2300
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
260 mm
Cartridge Style
SUPRApak S
Design Pressure (barg)
-1 to 6 bar
Diameter (Imperial)
5.1 in
Housing Height (Metric)
591.6 mm
Nominal Diameter (Metric)
130 mm
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UNIV SEAT CUP 1.75ID 316L product photo

UNIV SEAT CUP 1.75ID 316L

Product ID: T10575031
Unit of Measure
1/EA
Min Order Qty
1

Athalon, 6000psi Simplex Hsg, 1in Flange Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210G1604ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Athalon, 6000psi Simplex Hsg, 1.25in Manifold Mount, 4in Length, Fluorocarbon Seals

Product ID: UH210S2004ZG6H
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 400psi Simplex Hsg, 2.5in Flange Ports, 39in Length, Nitrile Seals

Product ID: HH8314F40XB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
39 in
Family
Ultipor
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 13in Length, Nitrile Seals

Product ID: HH9681K20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 13in Length, Nitrile Seals

Product ID: HH9681S20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Flange Ports, 13in Length, EPDM Seals

Product ID: HJ9681G20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: HZ9681K20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes
729 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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