Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

40 in

Product Type

Housings, Vessels, and Assemblies

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310E3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310E3240ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310G3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Non-bypass Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310G3240ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310G3240ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2in SAE Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310A3240ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2in SAE Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310A3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Non-bypass Simplex Hsg, 2in SAE Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310A3240ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2in BSP Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310C3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Non-bypass Simplex Hsg, 2in BSP Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310C3240ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2in BSP Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310C3240ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310D3240ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes
87 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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