Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

Seal Material

Fluorocarbon

Ultipor, 6500psi Duplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4740G24TB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4751E24TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4751E24UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Duplex Hsg, 1.5in Flange Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4754E24UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4751E24SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Duplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4754E24TB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Duplex Hsg, 1.5in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4754A24TB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Duplex Hsg, 1.5in SAE Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4754A24UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 400psi Simplex Hsg, 2.5in Flange Ports, 39in Length, Fluorocarbon Seals

Product ID: HZ8314D40XB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
39 in
Family
Ultipor
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Ultipor, 1200psi Duplex Hsg, 1.25in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ8670C20TB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor, 1200psi Duplex Hsg, 1.25in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ8670A20TB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 1200psi Duplex Hsg, 1.25in SAE Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ8670A20UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
See All Attributes
541 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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