Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Large Format Filters

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV12UNPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 1 cartridge

Product ID: PEV11UEPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 50 μm, Polyester, Size 2 cartridge, Fluorocarbon elastomer

Product ID: PEV502UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
50 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 25 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV252UNPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
25 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 25 μm, Polyester, Size 2 cartridge, Fluorocarbon elastomer

Product ID: PEV252UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
25 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 25 μm, Polyester, Size 1 cartridge

Product ID: PEV251UVPFCB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
25 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange, FSI CBFP Series vessels

Product ID: PEV12UNPFCB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 25 μm, Polyester, Size 2 cartridge, No flange

Product ID: PEV252UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
25 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 25 μm, Polyester, Size 2 cartridge

Product ID: PEV252UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
25 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 25 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange

Product ID: PEV252UNPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
25 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 50 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange, FSI Polylock FSPN Series vessels

Product ID: PEV502UNPFF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
50 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 5 μm, Polyester, Size 2 cartridge, No flange

Product ID: PEV52UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes
787 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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