Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

40 in

Product Type

Large Format Filters

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 40 Inches, Ethylene Propylene O-ring

Product ID: PFTM140UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 40 Inches, Ethylene Propylene U-cup

Product ID: PFTM140UHFJU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polypropylene, Length 40 inches, Fluoropolymer elastomer O-ring

Product ID: HFV640PP010AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
10 µm
Hardware Material
Acetal Caps
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Profile® Coreless Large Format Filters, Removal Rating 10 μm, Nylon, Length 40 inches

Product ID: E604N100NPL
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
10 µm
Media Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Polypropylene, Length 40 inches

Product ID: E604YE
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Media Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 20 μm, Polypropylene, Length 40 inches, 316L Stainless Steel Core Assembly

Product ID: E604Y200
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
20 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Nylon, Length 40 inches

Product ID: E604N400NPL
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Media Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 20 μm, Nylon, Length 40 inches

Product ID: E604N200
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
20 µm
Media Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Nylon, Length 40 inches

Product ID: E604NM
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Media Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 5 μm, Polypropylene, Length 40 inches

Product ID: E604Y050
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Nexis® High Flow Large Format Filters, Removal Rating 15 µm, Length 40 inches, Nitrile O-ring

Product ID: HFNX640Y150H13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
15 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
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Nexis® High Flow Large Format Filters, Removal Rating 10 µm, Length 40 inches, Nitrile O-ring

Product ID: HFNX640Y100H13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
10 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
See All Attributes
87 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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