Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Large Format Filters

Cartridge Length (Metric)

508 mm

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 20 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM2020UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Profile® Coreless Large Format Filters, Removal Rating 50 μm, Length 20 inches

Product ID: E602FPS500
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inch/mm
Filter Grade
50 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, Polypropylene, Length 20 Inches

Product ID: XLDM1020UHFJU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
10 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
20 in
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Marksman™ High Flow, Large Format Filters, Filter Grade 30 µm, Polypropylene, Length 20 Inches, Ethylene Propylene U-cup

Product ID: XLDM3020UHFJU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
30 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
20 in
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Marksman™ High Flow, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Length 20 Inches

Product ID: XLDM1520UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
1.5 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
20 in
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, Polypropylene, Length 20 Inches, Ethylene Propylene O-ring

Product ID: XLDM2020UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
20 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
20 in
See All Attributes

Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 20 inches

Product ID: HFNX620Y400H13
Unit of Measure
12/EA
Min Order Qty
12
Cartridge Length
20/508 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 20 Inches, Ethylene Propylene O-ring

Product ID: PFTM2020UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 3 µm, polypropylene, Length 20 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM320UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
3 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 20 Inches

Product ID: PFTM4020UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Profile® Coreless Large Format Filters, Removal Rating 10 μm, Length 20 inches

Product ID: E602FPS100
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inch/mm
Filter Grade
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm

Profile® Coreless Large Format Filters, Removal Rating 10 μm, Polypropylene, Length 20 inches, 316L Stainless Steel Core Assembly

Product ID: E602Y100
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20/508 inch/mm
Filter Grade
10 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
31 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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