Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Availability

In Stock

Product Type

Large Format Filters

Marksman™, Large Format Filters, Filter Grade 10 µm, Borosilicate micro fiberglass with acrylic binder, Size 2 bag, Nitrile

Product ID: DFNM102UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™, Large Format Filters, Borosilicate micro fiberglass with acrylic binder, Size 2 bag

Product ID: DFNM12UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™, Large Format Filters, Filter Grade 10 µm, Borosilicate micro fiberglass with acrylic binder, Size 1 bag, Nitrile

Product ID: DFNM101UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™, Large Format Filters, Filter Grade 70 µm, Borosilicate micro fiberglass with acrylic binder, Size 2 bag, Nitrile

Product ID: DFNM702UNPFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™, Large Format Filters, Filter Grade 3 µm, Borosilicate micro fiberglass with acrylic binder, Length 40 Inches

Product ID: DFNM34UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
3 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
40 in
See All Attributes

Marksman™, Large Format Filters, Filter Grade 70 µm, Borosilicate micro fiberglass with acrylic binder, Size 2 bag, EPDM

Product ID: DFNM702UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Profile® Coreless Large Format Filters, Removal Rating 50 μm, Length 40 inches

Product ID: E604FPS500
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
50 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 10 μm, Nylon, Length 40 inches, 316L Stainless Steel Core Assembly

Product ID: E604N100
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
10 µm
Media Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Polypropylene, Length 40 inches, 316L Stainless Steel Core Assembly

Product ID: E604Y400
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Polypropylene, Length 20 inches, 316L Stainless Steel Core Assembly

Product ID: E602Y400
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20/508 inch/mm
Filter Grade
40 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm

Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 20 inches

Product ID: HFNX620Y400H13
Unit of Measure
12/EA
Min Order Qty
12
Cartridge Length
20/508 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
See All Attributes

Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 40 inches, Ethylene propylene O-ring

Product ID: HFNX640Y400J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
See All Attributes
195 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English