Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Lube and Hydraulic Elements

Family

Red1000

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 19in 48.26cm

Product ID: HC2252FKS19H
Unit of Measure
2/EA
Min Order Qty
2
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2252
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
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Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC2252FRP10HN1)

Product ID: HC2252FKP10HN1
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2252
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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Discontinued

This part is no longer available. Please contact us for more information.

Element Coralon HC2253FCP16H

Product ID: HC2253FCP16H
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2253
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
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Element Coralon HC2253FCP16Z

Product ID: HC2253FCP16Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2253
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
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Element Coralon HC2256FCT6H

Product ID: HC2256FCT6H
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2256
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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Red1000 Glass Fiber 12 micron (Beta 1000) Fluorocarbon 6in 15.24cm (REPLACED BY HC2256FRS6Z)

Product ID: HC2256FKS6Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2256
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Wire Mesh 50 micron Nitrile 30in 76.2cm

Product ID: HC2286EOM30H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
50 micron
Filter Removal Rating (μm)
50 µm
See All Attributes

Red1000 Wire Mesh 50 micron Nitrile 15in 38.1cm

Product ID: HC2286EOM15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
50 micron
Filter Removal Rating (μm)
50 µm
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HC2286EOJ15H50

Product ID: HC2286EOJ15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
22 micron
Filter Removal Rating (μm)
22 µm
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Red1000 Wire Mesh 100 micron Nitrile 15in 38.1cm

Product ID: HC2286EOS15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
100 micron
Filter Removal Rating (μm)
100 µm
See All Attributes

HC2286EOJ12H50

Product ID: HC2286EOJ12H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
12 in
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187 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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