Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Membrane Filter

J,304L,18X48 product photo

J,304L,18X48

Product ID: P1174041
Unit of Measure
1/IN2
Min Order Qty
1
2PSS,W.S.,316SST,GR H,1/16T product photo

2PSS,W.S.,316SST,GR H,1/16T

Product ID: P2500142
Unit of Measure
1/IN2
Min Order Qty
1
Viton gasket for solvant tank diam.150 product photo

Viton gasket for solvant tank diam.150

Product ID: PCC0016B
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
NOMEX BAG FILTER, 100UM product photo

NOMEX BAG FILTER, 100UM

Product ID: HT100P2L
Unit of Measure
50/EA
Min Order Qty
50

PALLTIEROD316 SS 21.05INPTM#47227B003P2

Product ID: T11080031
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor® GF-HT, TA71HT003A

Product ID: TA71HT003A
Unit of Measure
1/EA
Min Order Qty
1
SW FILTER 100 UM 30" EXT TIN CORE product photo

SW FILTER 100 UM 30" EXT TIN CORE

Product ID: FBC100R30TE
Unit of Measure
15/EA
Min Order Qty
15
String wound 50 micron filter product photo

String wound 50 micron filter

Product ID: FNC50R40TE
Unit of Measure
10/EA
Min Order Qty
10

AB2UUA7H4

Product ID: AB2UUA7H4
Unit of Measure
1/EA
Min Order Qty
1

AB2UY0453H4

Product ID: AB2UY0453H4
Unit of Measure
1/EA
Min Order Qty
1
POWER SUPPLY,AB,DC UPS,10A/240W,24VDC, product photo

POWER SUPPLY,AB,DC UPS,10A/240W,24VDC,

Product ID: WH066615
Unit of Measure
1/EA
Min Order Qty
1
COMPRESSION SPRING ASSEMBLY product photo

COMPRESSION SPRING ASSEMBLY

Product ID: T932629100
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

12 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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