Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Metal Filters

HM56620-60 product photo

HM56620-60

Product ID: HM5662060
Unit of Measure
1/EA
Min Order Qty
1
ELEM,PACK,P , 1.63, product photo

ELEM,PACK,P , 1.63,

Product ID: D10761533J13A
Unit of Measure
50/EA
Min Order Qty
50
ELEM,PACK,P , 3.03, 2.63 product photo

ELEM,PACK,P , 3.03, 2.63

Product ID: D107615361205
Unit of Measure
50/EA
Min Order Qty
50
GASKET 2.18X1.90 DYN X5 product photo

GASKET 2.18X1.90 DYN X5

Product ID: D10876112
Unit of Measure
500/EA
Min Order Qty
500
ELEM,DISC,H , 7.00, 1.88, product photo

ELEM,DISC,H , 7.00, 1.88,

Product ID: D116097924J65T
Unit of Measure
10/EA
Min Order Qty
10
ELEM,BLBK,W , 2.50, 54.00, 150 product photo

ELEM,BLBK,W , 2.50, 54.00, 150

Product ID: D11881101H37S
Unit of Measure
1/EA
Min Order Qty
1
ELEM,CART,P , 2.00, 6.00, product photo

ELEM,CART,P , 2.00, 6.00,

Product ID: D118033100J60S
Unit of Measure
1/EA
Min Order Qty
1
D118784-02-1409 product photo

D118784-02-1409

Product ID: D118784021409
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 3.50,141.64, 50 product photo

ELEM,BLBK,W , 3.50,141.64, 50

Product ID: D12767002J04U
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 3.50,110.64, 50 product photo

ELEM,BLBK,W , 3.50,110.64, 50

Product ID: D12767201J04U
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 3.50,114.64, 50 product photo

ELEM,BLBK,W , 3.50,114.64, 50

Product ID: D12767001J04U
Unit of Measure
1/EA
Min Order Qty
1
ELEM,BLBK,W , 3.50,137.64, 50 product photo

ELEM,BLBK,W , 3.50,137.64, 50

Product ID: D12767202J04U
Unit of Measure
1/EA
Min Order Qty
1
83 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English