Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Service Spare Parts

GASKET GORE-TEX ST product photo

GASKET GORE-TEX ST

Product ID: D10512-120
Unit of Measure
1/EA
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1
F1303332 product photo

BOTTLE PSCP-BOTTLE

Product ID: F1303332
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1/EA
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F1309043 product photo

9660K VITON BK UP RING RING BK UP

Product ID: F1309043
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1/EA
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F1319910 product photo

MEMBRANE HPCA-2 1.2UMILPOR

Product ID: F1319910
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F1336303 product photo

SPRG COMP .36X.026X.625 SST

Product ID: F1336303
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PRESS TRANS,FOXBORO,0-30PSI,0.5IN product photo

PRESS TRANS,FOXBORO,0-30PSI,0.5IN

Product ID: WH010729
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1/EA
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PLC COMP,AB,1769IO,ANALOG OUTPUT,4CHAN product photo

PLC COMP,AB,1769IO,ANALOG OUTPUT,4CHAN

Product ID: WH179055
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LUBRICANT,FERGUSON PROSELECT,QUART product photo

LUBRICANT,FERGUSON PROSELECT,QUART

Product ID: WH200185
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ORG BUNA-N product photo

ORG BUNA-N

Product ID: T10540035
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1/EA
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1
ORH4-269 SILICONE O-RING product photo

ORH4-269 SILICONE O-RING

Product ID: T10540788
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1/EA
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1
ORH13-269 BUNA-N ORING product photo

ORH13-269 BUNA-N ORING

Product ID: T10540766
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1/EA
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ORH13-242 O-RING BUNA-N product photo

ORH13-242 O-RING BUNA-N

Product ID: T10540805
Unit of Measure
1/EA
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1
63 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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